发明名称 Interconnection structure for semiconductor package
摘要 An interconnection structure for being formed on bonding pads of a substrate in a semiconductor package is provided. The interconnection structure includes a nickel layer formed on each of the bonding pads, a metal layer formed on the nickel layer, and a solder material formed on the metal layer. The metal layer is made of one of gold, silver, lead and copper, and has a thickness in the range of 0.5 to 5 um. As such, when the solder material is reflowed to form solder bumps, no nickel-tin compound is formed between the solder bumps and the metal layer, thereby avoiding cracking or delamination of the solder bumps.
申请公布号 US9013042(B2) 申请公布日期 2015.04.21
申请号 US201213677861 申请日期 2012.11.15
申请人 Siliconware Precision Industries Co., Ltd. 发明人 Lin Chang-Fu;Tsai Ho-Yi;Yao Chin-Tsai;Ho Jui-Chung;Hung Ching-Hui
分类号 H01L23/48;H01L23/52;H01L29/40;H01L23/532;H01L23/00 主分类号 H01L23/48
代理机构 Mintz Levin Cohn Ferris Glovsky and Popeo, P.C. 代理人 Mintz Levin Cohn Ferris Glovsky and Popeo, P.C. ;Corless Peter F.;Jensen Steven M.
主权项 1. An interconnection structure for being formed on bonding pads of a substrate in a semiconductor package, comprising: a nickel layer formed on each of the bonding pads; a metal layer formed on the nickel layer, wherein the metal layer is made of one of gold, silver, and lead, and has a thickness in the range of 0.5 to 5 um; and a solder material formed on the metal layer and being free from directly contacting the nickel layer.
地址 Taichung TW