Production process for an interface unit and a group of such interface units

摘要

A process for producing an interface unit and also a group of such interface units are specified. The interface unit exhibits a first reference surface for beaming in radiation, a second reference surface for emitting the radiation, and an axis extending in the direction from the first to the second reference surface. The production process comprises the steps of setting an optical path length of the interface unit between the first and second reference surfaces along the axis and the fixing of the set optical path length of the interface unit. The optical path length of the interface unit is set in such a way that radiation of a defined numerical aperture beamed in at the first reference surface exhibits a focus location that is predetermined with respect to the second reference surface in the direction of the axis. A precise and uniform focus location with respect to the second reference surface is obtained.

主权项

1. A group of interface units which each include:
a support element having a first reference surface for positioning the interface unit with respect to a radiation-source providing radiation of a numerical aperture defined uniformly for the group, a contact element coupled to the support element and having a second reference surface, spaced from the first reference surface in a direction of an axis of the respective interface unit by a geometrical length, for emitting the radiation and positioning an object for irradiation with respect to the interface unit, wherein within the group a variability of a focus location of the radiation in the direction of the axis with respect to the second reference surface is smaller than a variability of the geometrical lengths of the group of interface units as a result of fixing the contact element in position along the axis such that the contact element is not displaceable along the axis.