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发明名称
具有单结晶薄膜之基板的制造方法
摘要
申请公布号
TWI482203
申请公布日期
2015.04.21
申请号
TW098106199
申请日期
2009.02.26
申请人
信越化学工业股份有限公司
发明人
久保田芳宏;川合信;田中好一;飞坂优二;秋山昌次;野岛义弘
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
一种具有单结晶薄膜之基板的制造方法,其特征为至少包括下列步骤:准备供体基板及处理基板之步骤A;于前述供体基板上层合成长单结晶层之步骤B;于形成有上述单结晶层之供体基板之单结晶层中注入离子而形成离子注入层之步骤C;将前述经注入离子之供体基板与前述处理基板贴合之步骤D;以及于前述贴合之供体基板之前述单结晶层中之离子注入层进行剥离之步骤E;藉此在前述处理基板上形成单结晶薄膜;将形成有上述单结晶薄膜之处理基板作为供体基板至少重复上述A~E之步骤。
地址
日本
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