Sandwich damascene resistor

摘要

A method is provided for forming sandwich damascene resistors in MOL processes and the resulting devices. Embodiments include forming on a substrate a film stack including an interlayer dielectric (ILD), a first dielectric layer, and a sacrifice layer (SL); removing a portion of the SL and the first dielectric layer, forming a first cavity; conformally forming a layer of resistive material in the first cavity and over the SL; depositing a second dielectric layer over the layer of resistive material and filling the first cavity; and removing the second dielectric layer, the layer of resistive material not in the first cavity, and at least a partial depth of the SL.

主权项

1. A method comprising:
forming on a substrate a film stack including an interlayer dielectric (ILD), a first dielectric layer, and a sacrifice layer (SL); removing the entire length of the SL and the first dielectric layer, forming a first cavity; conformally forming a layer of resistive material in the first cavity and over the SL; depositing a second dielectric layer over the layer of resistive material and filling the first cavity; removing the second dielectric layer, the layer of resistive material not in the first cavity, and at least a partial depth of the SL; forming a second SL over the first dielectric layer, subsequent to removing the first SL; removing a portion of the second SL and the first dielectric layer, forming a second cavity; conformally forming a layer of second resistive material in the second cavity and over the second SL; depositing a third dielectric layer over the layer of second resistive material and filling the second cavity; and removing the third dielectric layer and the layer of second resistive material not in the second cavity and the second SL.