| 发明名称 | Methods and apparatus for sensing a substrate in a load cup | ||
| 摘要 | Methods, apparatus, and systems are provided for detecting the presence of a substrate in a load cup. The invention includes a proximity sensor having a detection pad disposed below a contact surface of a load cup assembly and a target disposed on a lever member and adapted to move toward the detection pad when a substrate is placed on the lever member and adapted to move away from the detection pad when a substrate is removed from the lever member. Numerous additional aspects are disclosed. | ||
| 申请公布号 | US9013176(B2) | 申请公布日期 | 2015.04.21 |
| 申请号 | US201213360342 | 申请日期 | 2012.01.27 |
| 申请人 | Applied Materials, Inc. | 发明人 | Lischka David J.;Atkinson Jim K.;Domin Jonathan Paul;Liu Andrew |
| 分类号 | G01B7/14;G01B7/02 | 主分类号 | G01B7/14 |
| 代理机构 | Dugan & Dugan, PC | 代理人 | Dugan & Dugan, PC |
| 主权项 | 1. An apparatus for detecting a substrate in a load cup, the apparatus comprising: a proximity sensor having a detection pad disposed below a contact surface of a load cup assembly; and a target disposed on a lever member and adapted to move toward the detection pad when a substrate is placed on the lever member and adapted to move away from the detection pad when a substrate is removed from the lever member. | ||
| 地址 | Santa Clara CA US | ||