Collector mirror assembly and method for producing extreme ultraviolet radiation

摘要

A collector mirror assembly includes a collector mirror that includes a reflective surface and a hole having an edge. The hole extends through the reflective surface. The assembly also includes a tubular body having an inner surface and an outer surface. The tubular body is constructed and arranged to guide a gas flow in a direction substantially transverse to the reflective surface. The outer surface of the tubular body and the edge of the hole form an opening arranged to guide a further gas flow that diverges with respect the gas flow substantially transverse to the reflective surface.

主权项

1. A collector mirror assembly comprising:
a collector mirror having a reflective surface and a hole having an edge, the hole extending through the reflective surface; a tubular body that extends through the hole, the tubular body having an inner surface and an outer surface, the tubular body constructed and arranged to guide a main gas flow in a direction substantially transverse to the reflective surface; and an opening between the outer surface of the tubular body and the edge of the hole, the opening arranged to guide a further gas flow that diverges with respect to the main gas flow, wherein the opening is arranged to guide the further gas flow substantially along the reflective surface.