| 摘要 |
<p>Provided are an apparatus and a method for measuring a shape, capable of suppressing an effect of vibration due to a simple structure. The apparatus for measuring a shape (1) of the present invention includes: a light-transmitting optical component (4) having a reference plane (41) opposing to a surface (SS) of a sample (S); a light source (2) irradiating light having a predetermined wavelength region to the surface (SS) of the sample (S) through the optical component (4); an imaging spectrometer (6) measuring reflectance spectrums with respect to each position of a linear region defined on the surface (SS) of the sample (S); and a calculation unit (7) calculating a distance between each position of the linear region and the reference plane (41) based on the reflectance spectrums measured with respect to each position of the linear region.</p> |
