| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement scale for a photoelectric position measurement device that can be simply fabricated, and measures positions in a first direction and in a second direction extending orthogonally to the first direction, enabling a precise position measurement.SOLUTION: A measurement scale 1 includes a phase grating that has a grating element 2 arranged periodically in a first direction X and in a second direction Y. The grating elements each have an outer contour that is formed by a continuous straight line including two mutually opposing first straight sides K1, two mutually opposing second straight sides K2 extending perpendicularly to the first straight sides, and connecting lines K3 forming each obtuse angle α between the first straight sides K1 and the second straight sides K2. |
