| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma generator capable of generating plasma with high plasma density, while down-sizing.SOLUTION: A plasma generator 100 has a cylindrical first electrode 10, a second electrode 20, and an insulation tube 40. One tip 11 of the first electrode 10 is arranged in the insulation tube 40. The second electrode 20 is arranged on the outside of the insulation tube 40. The one tip 11 of the first electrode 10 has a protrusion, i.e., an end face S1. A micro hollow H1 is formed in the end face S1. |
