| 摘要 |
PROBLEM TO BE SOLVED: To provide a dust collecting apparatus that can continuously and efficiently collect dusts from a plurality of dust-collected objects while easily counting the number of metal foreign matter.SOLUTION: A dust collecting apparatus includes: a fixing jig 3 that fixes a dust-collected object 1 to which foreign matter is adhered; and a dust collector 11 that sucks the foreign matter. A capturing filter 14 for capturing the foreign matter is provided between the fixing jig 3 and the dust collector 11. The capturing filter 14 is sandwiched by a suction duct 9 and a lifting duct 5, and a transport device is provided to move the capturing filter 14 to a capturing position of the foreign matter, to an analysis position of the captured foreign matter, and to a cleaning position to remove the captured foreign matter. |
