| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vacuum device that can perform baking easily while preventing radiation leak.SOLUTION: A vacuum device 100 comprises a generation part for generating a charged particle beam or a primary radiation, a vacuum chamber 20 where a radiation source is arranged to generate a secondary radiation when the charged particle beam or primary radiation is radiated, a radiation shielding member 2 for shielding the secondary radiation generated by the radiation source, and a sealed container 4 for sealing the radiation shielding member 2.</p> |
