发明名称 LINEAR DEPOSITION UNIT AND DEPOSITION APPARUTUS COPRISING THE SAME
摘要 <p>This invention is about a linear deposition unit and deposition apparatus comprising the same. The deposition unit shown in example 1 of this invention includes: a linear bar module that is placed on the glass to deposit the evaporation materials on the glass with the mutually separated nozzles on the top portion; source supply module with linear aperture placed along with the length of the linear bar module, in which the evaporation materials passes. The invention increases the consuming time of evaporation materials by increasing the volume of evaporation materials and decreases the supplying number of evaporation materials.</p>
申请公布号 KR20150042053(A) 申请公布日期 2015.04.20
申请号 KR20130120787 申请日期 2013.10.10
申请人 发明人
分类号 C23C14/12;C23C14/24;H01L51/56;H05B33/10 主分类号 C23C14/12
代理机构 代理人
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