摘要 |
<p>This invention is about a linear deposition unit and deposition apparatus comprising the same. The deposition unit shown in example 1 of this invention includes: a linear bar module that is placed on the glass to deposit the evaporation materials on the glass with the mutually separated nozzles on the top portion; source supply module with linear aperture placed along with the length of the linear bar module, in which the evaporation materials passes. The invention increases the consuming time of evaporation materials by increasing the volume of evaporation materials and decreases the supplying number of evaporation materials.</p> |