发明名称 LASER FREQUENCY STABILIZING METHOD AND DEVICE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a laser frequency stabilizing method and a device thereof which are capable of stabilizing a frequency of a laser beam for a long period of time with less influence of disturbance like vibration and sound and of a temperature.SOLUTION: The laser frequency stabilizing device includes an optical system including a gas cell 20 and an optical system including an etalon 28. In a previous operation (initialization or the like) before an actual operation, a frequency of a laser beam emitted from a laser beam source is controlled on the basis of the light intensity of the laser beam transmitted through the optical system including the gas cell 20 to match the frequency of the laser beam with a center frequency of a saturation absorption line of the gas cell 20. A temperature of the etalon 28 is controlled on the basis of the light intensity of the laser beam transmitted through the etalon 28, and the temperature of the etalon at the time when a resonance frequency of the etalon 28 matches the frequency of the laser beam, namely the center frequency of the saturation absorption line, is detected as a calibration temperature. In the actual operation, the etalon 28 is kept at the calibration temperature, and the frequency of the laser beam emitted from the laser beam source is controlled on the basis of the light intensity of the laser beam transmitted through the optical system including the etalon 28.
申请公布号 JP2015076578(A) 申请公布日期 2015.04.20
申请号 JP20130213752 申请日期 2013.10.11
申请人 TOKYO SEIMITSU CO LTD 发明人 KAWADA YOSHIYUKI;AOTO TOMOHIRO;HAYASHI KYOHEI
分类号 H01S5/0687;H01S3/137 主分类号 H01S5/0687
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