| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element of which stress is hard to concentrate even if driven, having a high crack resistance.SOLUTION: A piezoelectric element 20 has a configuration in which a lower electrode 3, a piezoelectric film 2, and an upper electrode 2 are sequentially stacked at an upper part of a vibration plate 4. A plan view shape near an interface 12 to the upper electrode 1 of the piezoelectric film 2, when viewed from a stacking direction V, between the piezoelectric film 2 and the upper electrode 1, is formed almost similar to the contour of the upper electrode 1. A width Wy2 of the piezoelectric film 2 becomes abruptly wider as comes away from an interface end 12a to the upper electrode 1, while, the thickness of the piezoelectric film 2 in a region in the width Wy2 of the piezoelectric film 2 is formed to be a thickness corresponding to the fact that the width Wy2 of the piezoelectric film 2 becomes wider abruptly. |
