| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow control valve and a flow control device which maintain a constant flow rate of a fluid in high cleanliness and allow the change in setting of a fluid flow range.SOLUTION: A flow control valve comprises a valve body part 11 including a throttle part 15 and a valve seat 16, a first diaphragm 30 defining first and second chambers 21 and 22, a second diaphragm 35 which defines third and fourth chambers 26 and 27 and includes a valve body 38, a first movable part 40 moved forward and backward along with the first diaphragm 30, and a second movable part 50 moved forward and backward along with the second diaphragm 35. A connection chamber 70 is formed between the second chamber 22 and the fourth chamber 27, and an intermediate transmission member 80 which transmits movements of the first and second movable parts 40 and 50 to each other is disposed. The valve body 38 is moved forward and backward relative to the valve seat 16 by variation in pressure before and after the throttle part 15 to maintain a constant flow rate of a control object fluid. A throttle control valve body moved forward and backward relative to a throttle aperture and throttle control valve body forward/backward movement means for moving the throttle control valve body forward and backward are provided. |
