| 摘要 |
<p>Provided in the present invention is an apparatus for cleaning a substrate, which comprises: a pair of air spraying units which is placed in the upper part and the lower part of a transferring device for transferring a substrate to a lamination apparatus, and sprays air to the substrate in order to make foreign materials on the substrate float; and a suction unit which is placed adjacently to the air spraying unit, and sucks and removes the floating foreign materials by the air sprayed from the air spraying unit.</p> |
