CHARGED PARTICLE BEAM DISTRIBUTION MEASUREMENT SYSTEM, AND CHARGED PARTICLE BEAM DISTRIBUTION MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam distribution measurement system 8 and a charged particle beam distribution measurement method having resistance to a neutron beam, and capable of measuring distribution of a charged particle beam regardless of a shape of the beam.SOLUTION: A charged particle beam distribution measurement system 8 includes: a shielding film 17 in which a temperature change occurs in an irradiation region 18 when being irradiated with a charged particle beam; a cooling part 20 that cools at least a part of the shielding film 17 other than the irradiation region 18 of the shielding film 17; an infrared camera 15 that measures at least temperature distribution of the irradiation region 18 of the shielding film 17; and a computer 7 that calculates beam distribution from the temperature distribution measured by the infrared camera 15.