| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing device capable of improving workability by reducing the running-in time of a spindle.SOLUTION: A temperature of a shaft 37 of a spindle 12 is monitored using temperature sensors 43a-43d. A control unit 27 stores and maps in advance a processing position deviation of the spindle 12 on the basis of the monitored temperature of the shaft 37. In a cutting and dividing work of a workpiece, the processing position deviation or the like of the spindle 12 is known from the temperature obtained by the monitoring and the mapped data. A running-in time of the spindle 12 is reduced by correcting at least one of a feed of a spindle transfer mechanism 44 and a feed of a work table feed mechanism 45. |
