COMPACT HAZARDOUS GAS LINE DISTRIBUTION ENABLING SYSTEM SINGLE POINT CONNECTIONS FOR MULTIPLE CHAMBERS

摘要

A system and method for safely enabling the delivery of at least one gas line to at least one point of use in a facility by using a vacuum system and a gas delivery system wherein the gas delivery system is housed within the vacuum system is disclosed herein. An interior volume of a conduit containing therein at least one gas line is maintained at reduced pressure as one end of the gas line connects to a gas source and another end of the gas line connects to a point of use. By using a conduit to enclose the individual gas lines and using a single feed line for each gas, the embodiments disclosed herein reduce the number of individual gas lines that need to be run through a facility.

主权项

1. A method for safely enabling the delivery of a plurality of gas lines to at least one point of use in a facility comprising:
connecting a first vacuum conduit to a vacuum source, wherein the vacuum conduit comprises a conduit and a plurality of individual gas lines contained therein, and wherein the exterior of each of the plurality of individual gas lines is exposed to less than atmospheric pressure; and connecting each of the plurality of individual gas lines to a point of use while maintaining the exterior of each of the plurality of individual gas lines under less than atmospheric pressure.