| 摘要 |
[Problem] To provide a method for producing a L10-type FeNi ordered alloy, which enables the production of a thin-film-like L10-type FeNi ordered alloy in a relatively simple manner. [Solution] Fe and Ni are sputtered simultaneously or alternately onto the surface of a rotating substrate in an inert gas atmosphere to produce a FeNi alloy thin film or a Fe/Ni multilayer film, the thin film is heated to a predetermined temperature that is equal to or higher than 310ºC and lower than 400ºC at a temperature rising rate of 10ºC/sec or more in a vacuum atmosphere or an inert gas atmosphere, and then the heated film is retained at the predetermined temperature for 2 hours or longer. It is preferred that the substrate comprises an MgO single crystal substrate and the surface of the substrate is a (001) face. |
