| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor capable of easily detecting the density of plural kinds of gases or a sensor having a structure preferable for precisely detecting the density of the gases as a module.SOLUTION: The sensor includes: a semiconductor substrate having a cavity; and a first detection part and a second detection part each of which has a diaphragm structure and is disposed over the cavity. The first detection part is formed of a material which is different from that of the second detection part. Or, the sensor has a substrate mounted with: a semiconductor substrate having a cavity; a detection part constituted of a diaphragm structure disposed over the cavity; a cover covering the semiconductor substrate; and a semiconductor substrate, in which the cover includes a first opening disposed thereon, and the substrate includes a second opening disposed thereon. |
