METHOD FOR MANUFACTURING INVERTED METAMORPHIC MULTIJUNCTION SOLAR CELLS

摘要

A method of fabricating both a multijunction solar cell and an inverted metamorphic multijunction solar cell in a single process using a MOCVD reactor by forming a first multijunction solar cell on a semiconductor substrate; forming a release layer over the first solar cell; forming an inverted metamorphic second solar cell over the release layer; and etching the release layer so as to separate the multijunction first solar cell and the inverted metamorphic second solar cell.

主权项

1. A method of fabricating both a multijunction solar cell and an inverted metamorphic multijunction solar cell in a single process using a MOCVD reactor comprising:
providing a semiconductor substrate; forming a first multijunction solar cell on said semiconductor substrate; forming a release layer over the first solar cell; forming an inverted metamorphic second solar cell including: (i) growing a first solar subcell having a first band gap on said release layer; (ii) growing a second solar subcell over said first subcell having a second band gap smaller than said first band gap; growing a first grading interlayer over said second solar subcell; (iii) growing a third solar subcell over said grading interlayer having a fourth band gap smaller than said second band gap such that said third solar subcell is lattice mismatched with respect to said second solar subcell; and etching the release layer so as to separate the multijunction first solar cell and the inverted metamorphic second solar cell.