摘要 |
本案系关系于一种太阳能电池之制造方法,至少包括步骤:提供基板;形成射极层于基板之第一表面,其中基板与射极层间形成一pn接面;形成抗反射层于射极层上;于基板之第二表面设置遮罩,且第二表面系相对第一表面设置;于该遮罩上形成钝化层;移除遮罩,使部分之第二表面暴露形成开口;于第一表面及第二表面进行金属镀膜;以及于第一表面形成至少一第一电极,且于第二表面邻近开口处形成背表面电场和覆盖于开口及钝化层之至少一第二电极。藉此,以形成一品质较佳之钝化层开口,进而提升钝化射极背电极电池之品质。;A manufacturing method of solar cell is disclosed.The manufacturing method of solar cell includes steps of providing a substrate, forming an emitter layer on a first surface of the substrate, wherein a p-n junction is also formed between the substrate and the emitter layer, forming an anti-reflection coating on the emitter layer, forming a mask on a second surface of the substrate, and the second surface is corresponding to the first surface, forming a passivation layer on the mask, then removing the mask and forming openings to expose a portion of the second surface, conducting metallization on the first surface and second surface, and forming at least one first electrode on the first surface and forming a back-surface field on the second surface adjacent to the openings and forming at least one second electrode covering the openings and the passivation layerso as to form a well passivation layer and openings thereon, and the quality of the PERC is also improved. |