| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of designing a laminate, which allows for suppression of thermal deformation of even a laminate having anisotropy of thermal expansion coefficient.SOLUTION: The method of designing a laminate includes a step (S10) of temporarily determining a calculation parameter of the laminate and further includes a step (S20) of using the temporarily determined calculation parameter to calculate a thermal distortion amount of the laminate and a step (S30) of determining whether the thermal distortion amount is within an allowable range or not. If it is determined in the step (S30) that the thermal distortion amount is within the allowable range, the temporarily determined calculation parameter is determined as a design value. If it is determined in the step (S30) that the thermal distortion amount is on the outside of the allowable range, at least either one of a first relation between a preliminarily obtained ratio of a thickness of a crystal plate to a thickness of a substrate and the thermal distortion amount and a second relation between a crystal angle of the crystal plate and the thermal distortion amount to change the calculation parameter so that the thermal distortion amount is within the allowable range, and the calculation parameter resulting from the change is determined as the design value.</p> |
