| 摘要 |
PROBLEM TO BE SOLVED: To provide a continuous diffusion processing apparatus capable of improving the production efficiency and the processing quality at the same time while reducing energy loss.SOLUTION: A continuous diffusion processing apparatus of the present invention comprises: carrying tables 50 each of which carries a plate-like workpiece; a cylindrical heating furnace 1 which extends linearly; a carrying device 2 which carries in the carrying tables 50 by pushing them into the heating furnace 1 one by one, and which aligns the carrying tables 50 that have already been carried into the heating furnace 1 in a line and moves them inside the heating furnace 1; and a plurality of first partitioning members 7 which divide the space from a carry-in port 11 to a carry-out port 12 in the heating furnace 1 into a plurality of processing zones. The carrying device 2 intermittently moves the carrying tables 50 in units of processing zones. The carrying tables 50 each include second partitioning members 54 which close openings 7c of the first partitioning members 7 and divide the adjacent processing zones. |
