发明名称 |
METHOD AND SYSTEM FOR SUBMICROMETRIC STRUCTURING OF A SUBSTRATE SURFACE |
摘要 |
The invention relates to a method for submicrometric structuring of a surface (6) of a substrate (3) comprising steps for generating a plasma at atmospheric pressure above said surface (6); and injecting, on said surface (3), through said plasma, at least one gaseous precursor using at least one capillary (5) with a submicrometric diameter. The method can be implemented in a 3D printing system comprising a plate (2) moveable in three directions. |
申请公布号 |
WO2015052396(A1) |
申请公布日期 |
2015.04.16 |
申请号 |
WO2014FR52357 |
申请日期 |
2014.09.23 |
申请人 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE |
发明人 |
BELMONTE, THIERRY;AMARAL, THIAGO SILVA;GRIES, THOMAS;NOEL, CÉDRIC;CARDOSO, RODRIGO PERITO |
分类号 |
B81C1/00;C23C14/00;C23C16/44 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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