石墨烯薄膜制造方法;MANUFACTURING METHOD OF GRAPHENE FILM

摘要

一种石墨烯薄膜制造方法包括以下步骤：将一基板设置于一反应腔体，反应腔体具有一入口及一出口；提供一金属催化物于反应腔体中；通入一还原性气体至反应腔体中；升温反应腔体至一沉积温度；通入一含碳气体于反应腔体中；以及金属催化物协助含碳气体产生复数个碳原子，以沉积于基板以形成一石墨烯薄膜。本发明之石墨烯薄膜制造方法可于基板上沉积石墨烯薄膜，且具有于后端应用中无需再经过转移程序之优势。;A manufacturing method of graphene film includes the following steps: disposing a substrate in a reaction chamber, and the reaction chamber includes an inlet and an outlet; providing a metallic catalytic material in the reaction chamber; aerating a reducing gas into the reaction chamber; rising temperature of reaction chamber to a deposition temperature; aerating a carbon-containing gas into the reaction chamber; and generating a plurality of carbon atom from the carbon-containing gas under the assistance of the metallic catalytic material to deposit on the substrate to form a graphene film.The manufacturing method of graphene film is capable of depositing graphene film on the substrate.