| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a charged particle beam device mounting an aberration corrector composed of a multipole, including means for suppressing the impact on aberration correction by cancelling an external magnetic field approaching the aberration corrector and a noise due to a mirror body current.SOLUTION: In a charged particle beam device, a multipole has a multipole for controlling the aberration of a charged particle beam, a shield provided to cover the multipole, a magnetic field sensor arranged in the shield with a gap above the axis of the multipole, and detecting the magnetic field in the direction of the pole, and a cancel coil for cancelling the impact of a time-variant magnetic field on the multipole on the basis of detection signal from the magnetic sensor.</p> |
