METHOD AND SYSTEM FOR THE DETERMINATION OF VOLUMES OF VACUUM CHAMBERS AND EQUILIBRIUM TIMES FOR A VACCUUM SYSTEM

摘要

Provided is a method for determining a volume, at room temperature, of a first chamber having an unknown volume that is in fluid communication through a controllable valve with a second chamber having an unknown volume. The method can include measuring, by a pressure sensor coupled to one of the first chamber and the second chamber, a first equilibrium pressure of a gas that was introduced into the second chamber in both the first chamber and the second chamber after equilibrium is reached; measuring, by the pressure sensor, a second equilibrium pressure of the gas that was introduced into the second chamber in both the first chamber and the second chamber after equilibrium is reached, wherein the first chamber comprises an object with a known volume therein; and determining the volume of the first chamber based on the first equilibrium pressure and the second equilibrium pressure.