SUBSTRATE TRANSFER DEVICE

摘要

　This substrate transfer device (100) is provided with: a conveyor part (1) for transporting a substrate (CB) along a transportation direction and a first guide rail (2) and a second guide rail (3) provided so that a space is present therebetween in a substrate width direction; a motor (4); and a control unit (6) configured to perform a control in which the rail spacing is set to a first spacing (D1) and the substrate is transported, and the first guide rail is moved relative to the second guide rail on the basis of a detection value for the motor so that the rail spacing is set to a second spacing (D2) and a tilt in the substrate is corrected.