| 摘要 |
<p>A substrate processing apparatus is provided. The substrate processing apparatus according to an embodiment of the present invention comprises: a fixing chuck fixing a substrate; a protective plate interposed between the substrate and the fixing chuck; and a light irradiating device emitting light for processing the substrate, and located by facing the substrate. The protective plate includes a based member made of a transparent material, and a reflective plate enclosed by the base member. The light is irradiated to one surface of the reflective plate.</p> |
