CHARGED PARTICLE DEVICE

摘要

The objective of the present invention is to provide a charged particle device, wherein the distance from the outer periphery of the device to a microscope column is shortened to facilitate insertion and removal of a holder for sample exchange on a sample stage and observation of an observation image from a fluorescent plate observation window. The charged particle device has a microscope column (101), a charged particle beam optical system provided inside the microscope column (101), a sample stage (102) provided on the microscope column (101), a load plate (14) supporting the microscope column (101), an anti-vibration mount (15) supporting the load plate (14), and a frame (16), the load plate (14) being supported by the anti-vibration mount (15) at three locations, and the microscope column (101) on the load plate (14) being installed near the anti-vibration mount (15).