光电转换元件评价装置;PHOTOELECTRIC CONVERSION ELEMENT EVALUATION APPARATUS

摘要

光电转换元件评价装置包含：探测光源，将探测光照射至测量对象即光电转换元件；激升光源，将脉波状之激升光照射至探测光所照射的该光电转换元件；及受光元件，侦测经由该光电转换元件而获得的该探测光之变化量的时间依存性。此评价装置能利用非接触方式来评价光电转换元件之特性。所以，此评价装置能在不损坏到元件的情况下确实地评价(判断)移动中的光电转换元件之特性。; a pump light source adapted to irradiate, with a pulse-like pump light, the photoelectric conversion element on which the probe light is irradiated; and a light receiving element adapted to detect a time dependency of a change in a light amount of the probe light obtained via the photoelectric conversion element. This evaluation apparatus is able to evaluate the characteristic of the photoelectric conversion element in a non-contact manner. Therefore, this evaluation apparatus is able to properly evaluate (determine) the characteristic of the moving photoelectric conversion element without causing damage on it.