发明名称 VIBRATION PIECE, VIBRATION DEVICE, AND MANUFACTURING METHOD OF VIBRATION PIECE
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric vibration piece which prevents disconnection of electrode patterns conductive with excitation electrodes, and to provide a piezoelectric device and a manufacturing method of the piezoelectric vibration piece.SOLUTION: In a piezoelectric vibration piece, excitation electrodes 30 are provided on principal surfaces 12a and 12b of a piezoelectric base plate 12, and electrode patterns 32 conductive with excitation electrodes 30 are provided at a base end 18 side for supporting the piezoelectric base plate 12 in a cantilever manner. In the piezoelectric vibration piece, the electrode patterns 32 are drawn around entering portions 22 where an angle between the one principal surface 12a or 12b and a side surface 12c of the piezoelectric base plate 12 becomes an obtuse angle due to wet etching when an outer shape of the piezoelectric base plate 12 is formed.
申请公布号 JP2015073300(A) 申请公布日期 2015.04.16
申请号 JP20140235995 申请日期 2014.11.20
申请人 SEIKO EPSON CORP 发明人 MURAKAMI SHIRO
分类号 H03H9/19;H03H3/02 主分类号 H03H9/19
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