| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an optical measurement device which is robust against changes in acceleration or environmental temperature and which is small in size, lightweight and easily assembled.SOLUTION: The optical measurement device is configured in such a manner that: measurement light S1 emitted from a first light source and output via a first polarization maintaining optical fiber, and reference light S2 emitted from a second light source 120 and output via a second polarization maintaining optical fiber 102 are introduced into a prism unit 130 constituting an interferometer via a dual parallel beam collimator 190 comprising an integrated chassis 191 of first and second polarization maintaining collimators 111, 112; and reflected light from a measurement surface irradiated with the measurement light S1 and reflected light from a reference surface 115 comprising a retroreflector irradiated with the reference light S2 via the prism unit 130 are superposed by the prism unit 130 to obtain interference light.</p> |
