发明名称 METHOD OF PRODUCING GLASS SUBSTRATE AND GLASS SUBSTRATE
摘要 A method of producing a glass substrate having a first layer formed on a surface of the substrate by low-temperature CVD includes preparing the glass substrate and forming the first layer on the glass substrate by the low-temperature CVD. In the glass substrate after forming the first layer, an integrated value after a baseline correction in a wavenumber range of 2600 cm−1 to 3800 cm−1 in a peak due to OH groups obtained by an FTIR measurement on the first layer is 9.0 or less, and the C content of the first layer is 1.64 at % or less.
申请公布号 US2015103399(A1) 申请公布日期 2015.04.16
申请号 US201414552053 申请日期 2014.11.24
申请人 Asahi Glass Company, Limited 发明人 HANEKAWA Hiroshi;Aomine Nobutaka;Aoshima Yuki;Kawahara Hirotomo;Maeshige Kazunobu
分类号 C03C17/245;G02B5/20;G02B1/11;G02B5/08 主分类号 C03C17/245
代理机构 代理人
主权项 1. A method of producing a glass substrate having a first layer formed on a surface of the substrate by low-temperature CVD, the method comprising: preparing the glass substrate; and forming the first layer on the glass substrate by the low-temperature CVD, wherein, in the glass substrate after said forming the first layer, an integrated value after a baseline correction in a wavenumber range of 2600 cm−1 to 3800 cm−1 in a peak due to OH groups obtained by an FTIR measurement on the first layer is 9.0 or less, and a C content of the first layer is 1.64 at % or less.
地址 Tokyo JP