发明名称 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same, which prevents defects caused by an end of a semiconductor layer provided in an island shape and achieves improved reliability.SOLUTION: A semiconductor device comprises: an island-like semiconductor layer provided on a substrate; an insulation layer provided on a surface and lateral faces of the island-like semiconductor layer; and a gate electrode provided on the island-like semiconductor layer via an insulation layer. At this time, in the insulation layer provided in contact with the island-like semiconductor layer, a dielectric constant of a region which contacts the lateral face of the island-like semiconductor layer is made smaller in comparison with the surface of the island-like semiconductor layer.
申请公布号 JP2015073137(A) 申请公布日期 2015.04.16
申请号 JP20150006615 申请日期 2015.01.16
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAWAKI KAZUKO;SASAGAWA SHINYA;SUZAWA HIDEOMI;YAMAZAKI SHUNPEI
分类号 H01L21/336;H01L29/786 主分类号 H01L21/336
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