发明名称 PARTICLE COLLECTION JIG, PARTICLE COLLECTION METHOD, AND PARTICLE MEASURING DEVICE USING THE PARTICLE COLLECTION JIG
摘要 <p>PROBLEM TO BE SOLVED: To provide a particle collection jig capable of promptly collecting particles over a wide range to be used for measurement of the particles.SOLUTION: A particle collection jig which is connected to a sampling nozzle 52 of a particle measuring part 300, collects particles in gas, and guides the collected particles to a particle counter of the particle measuring part 300, has: a top plate 11 the whole shape of which forms a cylindrical shape, and which constitutes one end face; a bottom plate 12 which constitutes the another end face; and a louver 13 which constitutes a side face. A hole 14 for taking the surrounding gas containing the particles in an internal space is formed through the top plate 11, an outlet 15 for guiding the gas containing the particles to the sampling nozzle 52 is formed on the bottom plate 12, and a plurality of blades 16 of the louver 13 are arranged so that the surrounding gas containing the particles is taken in the internal space while being revolved from gaps 17 among between blades.</p>
申请公布号 JP2015072238(A) 申请公布日期 2015.04.16
申请号 JP20130209001 申请日期 2013.10.04
申请人 TOKYO ELECTRON LTD 发明人 IKEDA KYOKO
分类号 G01N15/00;G01N1/02;G01N15/06 主分类号 G01N15/00
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