| 发明名称 |
PROFILE MEASUREMENT SYSTEM AND PROFILE MEASUREMENT METHOD |
| 摘要 |
Provided are a profile measurement system and a profile measurement method capable of suppressing the influence of vibration with a simple configuration. The profile measurement system includes: a transmissive optical component having a reference plane opposed to a surface of a sample; a light source which irradiates the surface of the sample with light having a predetermined wavelength region through the transmissive optical component; an imaging spectrometer which measures a reflection spectrum for each position on a linear region defined on the surface of the sample; and a calculation unit which calculates a distance between each position on the linear region and the reference plane based on the measured reflection spectrum for each position on the linear region. |
| 申请公布号 |
US2015106057(A1) |
申请公布日期 |
2015.04.16 |
| 申请号 |
US201414511159 |
申请日期 |
2014.10.09 |
| 申请人 |
Otsuka Electronics Co., Ltd. |
发明人 |
SUGITA Kazuhiro;AKADA Tomohiro |
| 分类号 |
G01B11/24;G01B11/14;G01J3/28 |
主分类号 |
G01B11/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A profile measurement system, comprising:
a transmissive optical component having a reference plane opposed to a surface of a sample; a light source which irradiates the surface of the sample with light having a predetermined wavelength region through the transmissive optical component; an imaging spectrometer which measures a reflection spectrum for each position on a linear region defined on the surface of the sample; and a calculation unit which calculates a distance between each position on the linear region and the reference plane based on the measured reflection spectrum for each position on the linear region. |
| 地址 |
Osaka JP |
