| 摘要 |
The present invention relates to a wafer prober system capable of inspecting a wafer surface. The wafer prober system comprises: a stage unit; a loader; a tester; a control unit; and a wafer surface inspection unit for inspecting the surface of a wafer before or after probing a wafer. The wafer prober system can generate wafer surface inspection information respectively before and/or after probing a wafer by using the wafer surface inspection unit so as to carry out probing using the same or accurately recognize the state of the probing in real time. |
