发明名称 キャリア搬送システム
摘要 <p>PROBLEM TO BE SOLVED: To provide a carrier conveyance system for which updating or the like of an existent load port is not required.SOLUTION: The carrier conveyance system comprises: an OHT 7 in which a hoist part 71 supporting a hoop 8 is provided so as to be freely moved up and down and which is capable of freely transferring the hoop 8 from and to a load port 6; a temporary placement stage 2 which is disposed lower than the OHT 7 for temporarily placing thereon the hoop 8 transferred to the load port 6; and a carrier transfer wagon 3 in which a lift 32 for supporting the hoop 8 is provided so as to be freely moved up and down and which is capable of freely transferring the hoop 8 from and to the temporary placement stage 2 and from and to the load port 6. A travel rail 41 for guiding movement while supporting the carrier transfer wagon 3 is configured so as to form a space in which the hoist part 71 and the hoop 8 can be passed vertically when the OHT 7 transfers the hoop 8 to the load port 6 or the temporary placement stage 2.</p>
申请公布号 JP5700107(B2) 申请公布日期 2015.04.15
申请号 JP20130262213 申请日期 2013.12.19
申请人 发明人
分类号 H01L21/677;B65G49/07 主分类号 H01L21/677
代理机构 代理人
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