发明名称 露光装置用光照射装置
摘要 <P>PROBLEM TO BE SOLVED: To provide a light irradiation device for an exposure device which efficiently prevents damage to a lamp and a cover glass with a small space when impact is applied. <P>SOLUTION: A light irradiation device for an exposure device includes multiple light source parts 73 and cassettes 81 supporting the multiple light source parts 73. Cushioning members for a support medium 88, which absorb impact force applied to the support medium 82 and cushion impact force acting on the light source parts 73, are disposed on four corners at the front surface side of the support medium 82. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP5702122(B2) 申请公布日期 2015.04.15
申请号 JP20100264639 申请日期 2010.11.29
申请人 NSKテクノロジー株式会社 发明人 林 慎一郎
分类号 H01L21/027;F21S2/00;F21V15/01;G03F7/20 主分类号 H01L21/027
代理机构 代理人
主权项
地址