| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor having further high reliability. <P>SOLUTION: A dynamic quantity sensor comprises an anchor and a fixed electrode fixed to a substrate; a moving electrode formed separately from the substrate between the anchor and the fixed electrode, and electrically connecting with the fixed electrode when contacting with fixed electrode; and a beam connected with the anchor at one end, connected with the moving electrode at the other end, and formed separately from the substrate. The beam has a plurality of linear beams, and a beam connecting portion which connects two adjacent linear beams of the plurality of the linear beams while making longitudinal directions of the two linear beams different from each other. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
