APPARATUS FOR MANUFACTURING A MICROLENS ARRAY, AND METHOD FOR MANUFACTURING A MICROLENS ARRAY
摘要
An apparatus for manufacturing a micro lens array, wherein lenses having various standards are easily manufactured by forming a micro lens array by adjusting a vacuum condition in a vacuum chamber. The apparatus including: a vacuum chamber including a vacuum space therein; a vacuum unit for forming a vacuum inside the vacuum chamber; an upper frame disposed inside the vacuum chamber and to which a substrate is installed on a lower surface of the upper frame; an elevator for ascending and descending the upper frame; a lower frame disposed below the upper frame; a master plate disposed on the lower frame and includes a plurality of molding grooves on an upper surface of the master plate; and a heater installed to a side of the master plate to heat up the master plate.
申请公布号
EP2298542(A4)
申请公布日期
2015.04.15
申请号
EP20100760574
申请日期
2010.06.03
申请人
INHA INDUSTRY PARTNERSHIP INSTITUTE
发明人
LEE, HAN SUP;PARK, BYOUNG GUK;YANG, YI SEUL;CHOI, KI WOON;LEE, JOON HO;PARK, KI HO;YANG, HOI CHANG