发明名称 有機材料のための蒸発器、及び、蒸発器を用いて基板を有機材料で被覆するための方法
摘要 <p>An evaporator for vaporizing organic material is described. The evaporator includes a first chamber having a nozzle adapted to be directed to a substrate to be coated; at least one second chamber for vaporizing the organic material; at least one vapour channel for guiding vaporized organic material from the at least one second chamber to the first chamber; wherein the first chamber is adapted to provide vaporized organic material to the nozzle corresponding to a first virtual sublimation surface, and the at least one second chamber being adapted to provide during operation a second sublimation surface area, wherein the second sublimation surface area corresponds to at least 70 percent of the first virtual sublimation surface.</p>
申请公布号 JP5703224(B2) 申请公布日期 2015.04.15
申请号 JP20110528448 申请日期 2009.09.29
申请人 发明人
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
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