发明名称 加工装置
摘要 <p>The present invention provides a processing device, which can adjust the light radiation condition according to processed objects. The processing device has a camera component for recording objects to-be-processed kept on a chuck workbench. The camera component includes: a camera; a semi-transparent mirror; a first strobe light source, which radiates the objects to-be-processed vertically through the semi-transparent mirror; a plurality of optical fibers, which are configured to be a ring to make one end face of fibers face the objects to-be-processed; a second strobe light source, which makes the light shine on the other end face of the fibers to illuminate the objects to-be-processed in a ring; a first light quantity regulator, which is arranged between the first strobe light source and the semi-transparent mirror; and a second light quantity regulator, which is arranged between the second strobe light source and the other end face of the fibers, wherein the open parts of the first light quantity regulator and the second light quantity regulator make the light quantity change to form an extending shape in a way of increasing continuously by the corresponding rotating angle of the rotating axis.</p>
申请公布号 JP5700436(B2) 申请公布日期 2015.04.15
申请号 JP20110127008 申请日期 2011.06.07
申请人 发明人
分类号 B24B49/12;B23K26/10;H01L21/301 主分类号 B24B49/12
代理机构 代理人
主权项
地址