NEUTRAL LAYER POLYMER COMPOSITION FOR DIRECTED SELF ASSEMBLY AND PROCESSES THEREOF
摘要
The present invention relates to a novel polymeric composition comprising a novel polymer having two or more repeat units and a terminus having the structure (1): wherein R1 represents a C1-C20 substituted or unsubstituted alkyl group, w is a number from 1-8, X is oxygen (O) or nitrogen (N), and Rd is a reactive group. The invention also relates to a process for forming a pattern using the novel polymeric composition. The invention further relates to a process of making the novel polymer.
申请公布号
EP2859023(A1)
申请公布日期
2015.04.15
申请号
EP20130725273
申请日期
2013.05.14
申请人
AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.À.R.L.
发明人
WU, Hengpeng;POLISHCHUK, Orest;CAO, Yi;HONG, SungEun;YIN, Jian;LIN, Guanyang;PAUNESCU, Margareta;NEISSER, Mark