发明名称 極端紫外光生成装置
摘要 A laser device may include: a diffraction grating; and a plurality of semiconductor lasers disposed such that laser beams outputted therefrom are incident on the diffraction grating and at least one of diffraction beams of each laser beam travels in a predetermined direction.
申请公布号 JP5701618(B2) 申请公布日期 2015.04.15
申请号 JP20110002471 申请日期 2011.01.07
申请人 发明人
分类号 H01S3/23;H01L21/027;H01S3/10 主分类号 H01S3/23
代理机构 代理人
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