发明名称 半導体装置
摘要 A semiconductor device includes a semiconductor substrate in which an active region and an edge termination region are defined, a semiconductor element formed in the active region, and first to fourth P layers formed in a region spanning from an edge portion of the active region to the edge termination region in the surface of the semiconductor substrate. The first to fourth P layers respectively have surface concentrations P(1) to P(4) that decrease in this order, bottom-end distances D(1) to D(4) that increase in this order, and distances B(1) to B(4) to the edge of the semiconductor substrate that increase in this order. The surface concentration P(4) is 10 to 1000 times the impurity concentration of the semiconductor substrate, and the bottom-end distance D(4) is in the range of 15 to 30 μm.
申请公布号 JP5701447(B2) 申请公布日期 2015.04.15
申请号 JP20140503298 申请日期 2012.03.05
申请人 三菱電機株式会社 发明人 陳 則;中村 勝光
分类号 H01L29/06;H01L21/336;H01L29/12;H01L29/739;H01L29/78 主分类号 H01L29/06
代理机构 代理人
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