发明名称 |
METHOD FOR PRODUCING A MICROSYSTEM HAVING A THIN FILM MADE OF LEAD ZIRCONATE TITANATE |
摘要 |
A method for producing a micro system, said method comprising: providing a substrate (2) made of aluminum oxide; producing a thin film (6) on the substrate (2) by depositing lead zirconate titanate onto the substrate (2) with a thermal deposition method such that the lead zirconate titanate in the thin film (6) is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate (2) together with the thin film (6). |
申请公布号 |
EP2859130(A1) |
申请公布日期 |
2015.04.15 |
申请号 |
EP20130728730 |
申请日期 |
2013.06.12 |
申请人 |
PYREOS LTD. |
发明人 |
GIEBELER, CARSTEN;SCHREITER, MATTHIAS;STEINKOPFF, THORSTEN;WERSING, WOLFRAM |
分类号 |
C23C14/00;C23C14/02;C23C14/08;G01J5/34;H01L37/02 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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